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Design and Fabrication of Bulk-Micromachined Differential-Capacitive Tri-axial Accleromter

MUKHIYA, RAVINDRA (026309)

Design and Fabrication of Bulk-Micromachined Differential-Capacitive Tri-axial Accleromter A Dissertation Report - JAIPUR DEPARTMENT OF ECE, MNIT 2004 - vp.

Subjects--Topical Terms:
FABRICATION OF BULK-MICROMACHINED DIFFERENTIAL-CAPACITIVE TRI-AXIAL ACCLEROMTER
ELECTRONICS AND COMMUNICATION ENGINEERING

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Design and Fabrication of Bulk-Micromachined Differential-Capacitive Tri-axial Accleromter

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