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Foundations of MEMS

Liu, Chang

Foundations of MEMS - 2nd. - New Dlhi: Pearson Education, c2012. - 576p.

ISBN: 9788131764756

Subjects--Topical Terms:
Microelectromechanical systems.
MEMS

Dewey Class. No.: 621.3 / LIU

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Foundations of MEMS

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