MEMS/NEMS , V-3 MANUFACTURING METHODS HANDBOOK, TECHNIQUES AND APPLICATIONS
MEMS/NEMS , V-3 MANUFACTURING METHODS HANDBOOK, TECHNIQUES AND APPLICATIONS
edited by LEONDES, CORNELIUS T
- New York SPRINGER SCIENCE + BUSINESS MEDIA 2006
MICROELECTROMECHANICAL SYSTEMS- DESIGN AND CONSTRUCTION
NANOTECHNOLOGY
MECHANICAL ENGINEERING
R 620.5 / LEO
MICROELECTROMECHANICAL SYSTEMS- DESIGN AND CONSTRUCTION
NANOTECHNOLOGY
MECHANICAL ENGINEERING
R 620.5 / LEO