MEMS/NEMS , V-3 MANUFACTURING METHODS HANDBOOK, TECHNIQUES AND APPLICATIONS

MEMS/NEMS , V-3 MANUFACTURING METHODS HANDBOOK, TECHNIQUES AND APPLICATIONS edited by LEONDES, CORNELIUS T - New York SPRINGER SCIENCE + BUSINESS MEDIA 2006


MICROELECTROMECHANICAL SYSTEMS- DESIGN AND CONSTRUCTION
NANOTECHNOLOGY
MECHANICAL ENGINEERING

R 620.5 / LEO