Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.
By: Sarkar, Jaydeep.
Material type:
BookPublisher: New York Elsevier c2014Description: x, 603 pages : illustrations ; 25 cm.ISBN: 9780815515937; 0815515936.Subject(s): Electronics and communication engineering | Microelectronics -- Materials | Cathode sputtering (Plating process) -- Materials | Integrated circuits -- Very large scale integration -- Materials | Thin film devices -- Materials | Flat panel displays -- Materials | Sputtering (Physics)DDC classification: 621.381
| Item type | Current location | Call number | Status | Date due | Barcode |
|---|---|---|---|---|---|
| REFERENCE | Malaviya National Institute of Technology Reference | 621.381 SAR (Browse shelf) | Not for loan | 88224 |
Includes bibliographical references and index.
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