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Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar.

By: Sarkar, Jaydeep.
Material type: materialTypeLabelBookPublisher: New York Elsevier c2014Description: x, 603 pages : illustrations ; 25 cm.ISBN: 9780815515937; 0815515936.Subject(s): Electronics and communication engineering | Microelectronics -- Materials | Cathode sputtering (Plating process) -- Materials | Integrated circuits -- Very large scale integration -- Materials | Thin film devices -- Materials | Flat panel displays -- Materials | Sputtering (Physics)DDC classification: 621.381
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REFERENCE Malaviya National Institute of Technology
621.381 SAR (Browse shelf) Not for loan 88224

Includes bibliographical references and index.

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