Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices

By: PAIK, UNGYUContributor(s): PARK, JEA-GUNMaterial type: Text

TextPublication details: London CRC Press 2009 Description: xiii,191pISBN: 9781420059113Subject(s): NANOPARTICLES | CHEMICAL MECHANICAL PLANARIZATION | NANOTECHNOLOGYDDC classification: 620.5

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
General Books	Malaviya National Institute of Technology	620.5 PAI (Browse shelf(Opens below))	Available		79324

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