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Nanoparticle Engineering for Chemical-Mechanical Planarization Fabrication of Next-Generation Nanodevices

By: PAIK, UNGYU.
Contributor(s): PARK, JEA-GUN.
Material type: materialTypeLabelBookPublisher: London CRC Press 2009Description: xiii,191p.ISBN: 9781420059113.Subject(s): NANOPARTICLES | CHEMICAL MECHANICAL PLANARIZATION | NANOTECHNOLOGYDDC classification: 620.5
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Item type Current location Call number Status Date due Barcode
General Books General Books Malaviya National Institute of Technology
620.5 PAI (Browse shelf) Available 79324

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