TY  - BOOK
AU  - GHANDHI, SORAB K
TI  - VLSI Fabrication Principles: Silicon and Gallium Arsenide
SN  - 9788126517909
U1  - 621.38171 
PY  - 1994///
PY  - 2012///
CY  - New York
PB  - John Wiley & Sons
KW  - Electronics and communication engineering
KW  - Silicon
KW  - Integrated circuits--Very large scale integration
KW  - Gallium arsenide
ER  -