TY  - BOOK
AU  - JACKSON, MARK J.
TI  - Microfabrication and Nanomanufacturing
U1  - 620.5 
PY  - 2006///
CY  - London
PB  - TAYLOR & FRANCIS
KW  -  MICROELECTROMECHANICAL SYSTEMS --DESIGN AND CONSTRUCTION
KW  - MECHANICAL ENGINEERING
ER  -