TY  - BOOK
AU  - CAMPBELL, STEPHEN A
TI  - The Science And Engineering Of Microelectronic Fabrication
PY  - 2001///
CY  - NEW YORK
PB  - OXFORD UNIVERSITY PRESS
KW  -  THE SCIENCE AND ENGINEERING OF MICROELECTRONIC FABRICATION
KW  - ELECTRONICS AND COMMUNICATION ENGINEERING
ER  -