TY - BOOK AU - KLEISSL,H.J. RITZHAUPT and JOHANDER,PER TI - Ceramics Processing in Microtechnology SN - 9781439808689 U1 - R 666 PY - 2009/// CY - DUNBEATH PB - WHITTLES PUBLISHING KW - DESIGN RULES KW - CERAMICS IN MICROTECHNOLOGY ER -