TY  - BOOK
AU  - Liu, Chang
TI  - Foundations of mems
SN  - 9788131764756
U1  - 621.31 
PY  - 2012///
CY  - Delhi
PB  - Pearson India Education
KW  - Electrical Engineering
KW  -  Microelectromechanical systems
KW  - Mechanical Engineering
ER  -