TY  - BOOK
AU  - LEONDES, CORNELIUS T
TI  - MEMS/NEMS, V-I DESIGN METHODS: HANDBOOK TECHNIQUES AND APPLICATIONS
U1  - R 620.5 
PY  - 2006///
CY  - New York
PB  - SPRINGER SCIENCE + BUSINESS MEDIA
KW  -  DESIGN METHODS IN MEMS/NEMS
KW  -  MICROELECTROMECHANICAL SYSTEMS-DESIGN AND CONSTRUCTION
KW  - MECHANICAL ENGINEERING
ER  -