TY - BOOK AU - LEONDES , CORNELIUS T TI - MEMS/NEMS HANDBOOK HANDBOOK TEACHNIQUES AND APPLICATION: VOL -5 MEDICAL APPLICATION AND MOEMS U1 - R 620.5 PY - 2006/// CY - New York PB - SPRINGER SCIENCE + BUSINESS MEDIA KW - MEMS/NEMS HANDBOOK HANDBOOK TEACHNIQUES AND APPLICATION KW - NANOTECHNOLOGY ER -