TY  - BOOK
AU  - LEONDES, CORNELIUS T
TI  - MEMS/NEMS , V-3 MANUFACTURING METHODS: HANDBOOK, TECHNIQUES AND APPLICATIONS
U1  - R 620.5 
PY  - 2006///
CY  - New York
PB  - SPRINGER SCIENCE + BUSINESS MEDIA
KW  -  MICROELECTROMECHANICAL SYSTEMS- DESIGN AND CONSTRUCTION
KW  -  NANOTECHNOLOGY
KW  - MECHANICAL ENGINEERING
ER  -