TY  - BOOK
AU  - May, Gary S
AU  - Sze, Simon M
TI  - Fundamentals of Semiconductor Fabrication
SN  - 981253072x
U1  - 621.381 5 
PY  - 2004///
CY  - Singapore
PB  - John Wiley & sons ( Asia) Pte. Ltd.
KW  - Electronics & Communication Engineering
KW  - Semiconductor
KW  - Integrated circuits
ER  -