TY - BOOK AU - Korvink, Jan. G AU - Greiner, Andreas TI - Semiconductors for micro- and nanotechnology : : an introduction for engineers SN - 9783527302574 U1 - R621.3815 PY - 2002/// CY - Weinheim PB - Wiley- Vch KW - Semiconductors KW - Nanotechnology ER -