TY  - BOOK
AU  -  Liu, Chang
AU  - Mungurwadi, Vaishali B.
AU  - Nandi, Anil V.
TI  - Foundations of MEMS
SN  - 9788131764756
U1  - 621.3 
PY  - 2012///
CY  - New Dlhi
PB  - Pearson Education
KW  - Microelectromechanical systems
KW  - MEMS
ER  -