Nanoparticle Engineering for Chemical-Mechanical Planarization
Fabrication of Next-Generation Nanodevices
PAIK, UNGYU
creator
PARK, JEA-GUN
text
xxu
London
CRC Press
2009
monographic
eng
xiii,191p.
NANOPARTICLES
CHEMICAL MECHANICAL PLANARIZATION
620.5 PAI
9781420059113
140414