| 000 | 00474pam a2200145a 44500 | ||
|---|---|---|---|
| 008 | 140414b2006 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_a620.5 _bJAC |
||
| 245 |
_aMicrofabrication and Nanomanufacturing _cedited by JACKSON, MARK J. |
||
| 260 |
_aLondon _bTAYLOR & FRANCIS _c2006 |
||
| 650 | _a MICROELECTROMECHANICAL SYSTEMS --DESIGN AND CONSTRUCTION. | ||
| 650 | _aMECHANICAL ENGINEERING | ||
| 690 | _aMECHANICAL ENGINEERING | ||
| 700 | _aJACKSON, MARK J. | ||
| 906 | _a20616 | ||
| 999 |
_c19947 _d19947 |
||