000 00372pam a2200133a 44500
008 140414b2006 xxu||||| |||| 00| 0 eng d
082 _a621.381
_bGAD
245 _aMEMS DESIGN & FABRICTION
_cedited by Gad-el Haq Mohd
250 _asecond Ed.
260 _alondon
_bTAYLOR & FRANCIS
_c2006
690 _aMECHANICAL ENGINEERING
700 _aGad-el Haq Mohd
906 _a34259
999 _c32593
_d32593