000 00559pam a2200181a 44500
008 140414b2009 xxu||||| |||| 00| 0 eng d
020 _a9781439808689
082 _aR 666
_bKLE
245 _aCeramics Processing in Microtechnology
_cedited by KLEISSL,H.J. RITZHAUPT and JOHANDER,PER
260 _aDUNBEATH
_bWHITTLES PUBLISHING
_c2009
300 _axx,332p.
650 _a DESIGN RULES
650 _aCERAMICS IN MICROTECHNOLOGY
690 _aCHEMICAL ENGINEERING
700 _aKLEISSL,H.J. RITZHAUPT and JOHANDER,PER
906 _a5087
942 _2ddc
_cREF
999 _c4828
_d4828