000 00575pam a2200145a 44500
999 _c51316
_d51316
008 140414b2004 xxu||||| |||| 00| 0 eng d
100 _aMUKHIYA, RAVINDRA (026309)
245 _aDesign and Fabrication of Bulk-Micromachined Differential-Capacitive Tri-axial Accleromter
_c: A Dissertation Report
260 _aJAIPUR
_bDEPARTMENT OF ECE, MNIT
_c2004
300 _avp.
650 _a FABRICATION OF BULK-MICROMACHINED DIFFERENTIAL-CAPACITIVE TRI-AXIAL ACCLEROMTER
650 _aELECTRONICS AND COMMUNICATION ENGINEERING
700 _aSANCHETI, SANDEEP
_eSupvr
942 _cDS