| 000 | 00506pam a2200193a 44500 | ||
|---|---|---|---|
| 008 | 140414b2012 xxu||||| |||| 00| 0 eng d | ||
| 020 | _a9788131764756 | ||
| 082 |
_a621.3 _bLIU |
||
| 100 | _a Liu, Chang | ||
| 245 | _aFoundations of MEMS | ||
| 250 | _a2nd. | ||
| 260 |
_aNew Dlhi: _bPearson Education, _cc2012. |
||
| 300 | _a576p. | ||
| 650 | _aMicroelectromechanical systems. | ||
| 650 | _aMEMS | ||
| 700 |
_aMungurwadi, Vaishali B. _eeditor |
||
| 700 |
_aNandi, Anil V. _eeditor |
||
| 942 |
_2ddc _cBK |
||
| 999 |
_c52828 _d52828 |
||