000 00534pam a2200157a 44500
008 140414b2006 xxu||||| |||| 00| 0 eng d
082 _aR 620.5
_bLEO
100 _aLEONDES , CORNELIUS T
245 _aMEMS/NEMS HANDBOOK HANDBOOK TEACHNIQUES AND APPLICATION
_bVOL -5 MEDICAL APPLICATION AND MOEMS
260 _aNew York
_bSPRINGER SCIENCE + BUSINESS MEDIA
_c2006
650 _a MEMS/NEMS HANDBOOK HANDBOOK TEACHNIQUES AND APPLICATION
650 _aNANOTECHNOLOGY
690 _aNANOTECHNOLOGY
906 _a58838
942 _2ddc
_cREF
999 _c53250
_d53250