| 000 | 00597pam a2200169a 44500 | ||
|---|---|---|---|
| 008 | 140414b2006 xxu||||| |||| 00| 0 eng d | ||
| 082 |
_aR 620.5 _bLEO |
||
| 245 |
_aMEMS/NEMS , V-3 MANUFACTURING METHODS _bHANDBOOK, TECHNIQUES AND APPLICATIONS _cedited by LEONDES, CORNELIUS T |
||
| 260 |
_aNew York _bSPRINGER SCIENCE + BUSINESS MEDIA _c2006 |
||
| 650 | _a MICROELECTROMECHANICAL SYSTEMS- DESIGN AND CONSTRUCTION | ||
| 650 | _a NANOTECHNOLOGY | ||
| 650 | _aMECHANICAL ENGINEERING | ||
| 690 | _aMECHANICAL ENGINEERING | ||
| 700 | _aLEONDES, CORNELIUS T | ||
| 906 | _a58844 | ||
| 942 |
_2ddc _cREF |
||
| 999 |
_c53256 _d53256 |
||