| 000 | 00539nam a22001817a 4500 | ||
|---|---|---|---|
| 008 | 240816b |||||||| |||| 00| 0 eng d | ||
| 020 | _a9783527302574 | ||
| 082 |
_aR621.3815 _bKOR |
||
| 100 | _aKorvink, Jan. G | ||
| 245 |
_aSemiconductors for micro- and nanotechnology : _ban introduction for engineers |
||
| 260 |
_aWeinheim _bWiley- Vch _c2002 |
||
| 300 | _a340p. | ||
| 650 | _aSemiconductors | ||
| 650 | _aNanotechnology | ||
| 690 | _aElectronics and communication engineering | ||
| 700 | _aGreiner, Andreas | ||
| 942 |
_cREF _2ddc |
||
| 999 |
_c80260 _d80260 |
||